2004 VLSI Technology Short Course Program Emerging Nano-Electronic Technologies: Scaling MOSFETs to the Ultimate Limits and Beyond-MOSFET Approaches Monday, June 14, 2004 Organizers: Peter Zeitzoff, International SEMATECH Tohru Mogami, NEC 8:00 a.m. Introduction Tohru Mogami, NEC 8:15 a.m. Transistor Scaling to the End of the Roadmap Thomas Skotnicki, STMicroelectronics 10:00 a.m. Break 10:15 a.m. Classical Planar Bulk MOSFET Challenges, Key Innovations, and Ultimate Limits Toshihiro Sugii, Fujitsu 12:00 p.m. Lunch 1:15 p.m. Non-Classical CMOS Challenges, Key Innovations, and Ultimate Limits Toshiro Hiramoto, University of Tokyo 3:00 p.m. Break 3:15 p.m. Emerging Information Processing Logic Technologies Beyond CMOS James Hutchby, SRC 5:00 p.m. Conclusion